Ion implantation

This process implants ions into a wafer to change its characteristics.

Ion implantation is a pivotal and highly controlled process in semiconductor manufacturing, employed to introduce specific dopant atoms into a semiconductor substrate, typically a silicon wafer. In this method, high-energy ions, often boron, phosphorus, or arsenic, are accelerated and directed towards the semiconductor surface. As these ions penetrate the material, they embed themselves into the crystal lattice, altering the electrical properties of the semiconductor. The implantation process allows for precise control over the doping concentration and depth, enabling the creation of specific regions with desired electrical characteristics, essential for the development of transistors and other semiconductor devices.

 

The applications of ion implantation are diverse, ranging from modifying the conductivity of silicon to creating p-n junctions in integrated circuits. By strategically implanting dopant ions into the semiconductor material, manufacturers can tailor the electrical properties to meet the requirements of specific device functionalities. Ion implantation is a key step in the overall semiconductor fabrication process, contributing to the creation of highly integrated and performance-optimized electronic components that form the backbone of modern technology.

Common process steps across semiconductor manufacturing

Thickness measurement

Optimize precision in material analysis with Hamamatsu's solutions for thickness measurement. Explore our technologies designed for accurate and reliable thickness measurement across various materials and see how we are helping the industry with advanced measurement capabilities, ensuring superior quality and performance for your applications.

Endpoint detection, plasma luminescence analysis

Learn more about our cutting-edge solutions in endpoint detection and plasma luminescence analysis for semiconductor manufacturing. Discover advanced technologies that offer real-time monitoring, ensuring precision and control in processes such as etching, oxidation diffusion film deposition, and sputtering.

Electrostatic charge removal (ESD)

Explore Hamamatsu's meticulously engineered electrostatic charge removal solutions, designed to enhance reliability across various processes. Our technology efficiently removes charges that could potentially damage the wafer, ensuring high-quality processes.

Wafer alignment

Elevate semiconductor manufacturing with Hamamatsu's solutions for wafer alignment. Our technologies are designed for accurate wafer positioning, enhancing efficiency and yield in semiconductor production. Discover how we are helping wafer alignment, delivering unparalleled reliability and performance for your semiconductor processing needs.

Inspection for particle contamination and surface defects

Ensure pristine semiconductor production with Hamamatsu's advanced wafer inspection for contaminates solutions. Discover our sophisticated technologies meticulously crafted for accurate contaminant detection, safeguarding semiconductor wafers from impurities. Explore how Hamamatsu's expertise in wafer inspection sets the standard for reliability and quality in semiconductor manufacturing processes.

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