走査電子顕微鏡(SEM:Scanning Electron Microscope)は電子線を試料にあてて、試料表面から出てくる電子を検出することで数10倍~100万倍程度の表面の拡大像を取得できる顕微鏡です。
電子線は光よりも波長が非常に短いため、光学顕微鏡よりはるかに微細な観察・組成分析が可能です。X線検出器(EDS(X))、結晶方位解析装置(EBSD)、カソードルミネッセンス測定装置(CL)を取り付けて、各種分析を行うことも可能です。SEM は焦点深度が深く、光学顕微鏡より高い分解能を有するため、材料や半導体デバイス、医学、生物学など、さまざまな分野で幅広く利用されています。
試料をそのままの状態で観察することが求められています。試料の前処理が不要で、低真空下での試料の劣化や分析精度の低下を防ぐことが可能な帯電除去用光源をラインアップしています。
二次電子を効率よく取得でき、コレクター電圧を可変して、反射電子も取得できる検出器が求められています。蛍光体から高圧電源まで二次電子検出に必要なデバイスを提案することが可能です。
二次電子検出器並みの応答速度が求められており、加速電圧の影響を受けずに十分な信号量と明瞭な組成コントラストが得られることと、組成由来・表面形状由来の信号を目的に応じて取得できることが求められています。
電子線励起や光源励起による位置や波長における光強度の経時変化を高時間分解能で測定するシステムです。
浜松ホトニクスではSEMで使用するシンチレータやコレクタに高電圧を供給可能な高圧電源を提供しています。光電子増倍管(PMT)メーカーとして長年培った技術を生かし、バイポーラ出力や複数電源の一体化など、さまざまな用途に対応した高安定な高圧電源をラインアップしているほか、お客様の要望に応じたカスタム対応も実施しています。
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