FIB-SEM(集束イオンビーム走査電子顕微鏡)は、集束イオンビーム(FIB)と走査電子顕微鏡(SEM)を組み合わせた装置です。 FIBは試料の表面を精密に加工し、SEMは高解像度の画像を提供します。この組み合わせにより、試料の内部構造を詳細に観察することが可能です。 FIB-SEMは、半導体、材料科学、生物学などの分野で広く利用されており、TEM(透過電子顕微鏡)用薄膜試料の作成やSEM(走査電子顕微鏡)用断面試料の作成、 加工面をそのままEDS分析、結晶方位解析(EBSD)が可能な装置です。
特に近年活発に開発が行われている3Dデバイスや高機能材料のCut&Seeによる三次元解析にも使用されています。
走査電子顕微鏡(SEM)もしくは複合ビーム加工監察装置(FIB-SEM)に搭載して、SEM観察をしながら高位置精度にて高速且つ大面積加工を実現できる、最適な独自開発光学系と超短パルスレーザと組み合わせたレーザ加工エンジンの開発に取り組んでいます。取り付けに関しては、ご使用の電子顕微鏡メーカー様へご相談ください。
関連特許情報:特開2024-167734、WO2024/018541
試料 | Cu |
---|---|
加工時間 | 190 s |
加工領域 | 1,000 μm × 1,000 μm × 52 μm |
試料 | Ni |
---|---|
加工時間 | 60 s |
加工領域 | 1,000 μm × 1,000 μm × 57 μm |
マイクロジュールクラスの高エネルギーなフェムト秒レーザで、レーザヘッド、コントローラ、空冷システムが一体化されています。高品質なアルミニウムケース内で温度制御された光学部品によって、安定した短パルスレーザを生成します。
試料をそのままの状態で観察することが求められています。試料の前処理が不要で、低真空下での試料の劣化や分析精度の低下を防ぐことが可能なチャージアップ除去光源ユニットをラインアップしています。取り付けに関しては、ご使用の電子顕微鏡メーカー様へご相談ください。
二次電子を効率よく取得でき、コレクター電圧を可変して、反射電子も取得できる検出器が求められています。蛍光体から高圧電源まで二次電子検出に必要なデバイスを提案することが可能です。
二次電子検出器並みの応答速度が求められており、加速電圧の影響を受けずに十分な信号量と明瞭な組成コントラストが得られることと、組成由来・表面形状由来の信号を目的に応じて取得できることが求められています。
二次電子検出および反射電子検出における、検出効率等の向上や高速化を目的とした検出器と読み出し回路を、お客様のご要求仕様に合わせて、電子線検出モジュールとして提供します。
電子線検出モジュールのイメージ図
浜松ホトニクスではSEMで使用するシンチレータやコレクタに高電圧を供給可能な高圧電源を提供しています。光電子増倍管(PMT)メーカーとして長年培った技術を生かし、バイポーラ出力や複数電源の一体化など、さまざまな用途に対応した高安定な高圧電源をラインアップしているほか、お客様の要望に応じたカスタム対応も実施しています。
電子線励起や光源励起による位置や波長における光強度の経時変化を高時間分解能で測定するシステムです。
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