チップを樹脂で封止する工程です。
封止時の異物検査を行います。
狭ピッチ化により封止材内に混入する極小異物の検出レベルが高まっています。
異物検査に必要な高輝度発光が可能な各種光源をラインアップしています。
デバイスの不良の原因となる異物や欠陥の検査を行います。
デバイス表面の傷・汚れやボイド・クラックなどの微小異物や微細欠陥の検査を可能にします。半導体デバイスの小型化・微細化・高集積化に伴い、高精度な情報取得が求められています。
近赤外域に高い感度をもつAPS型CMOSエリアイメージセンサです。画素フォーマットは、SXGA (1280 × 1024画素)で、最大146 frames/sでの撮像が可能です。
高速撮像時などの低照度下においても十分な明るさの画像が得られるTDI-CCDです。TDI動作により、移動する対象物を積分露光することで、感度を飛躍的に向上させました。
近赤外域に感度を有するカメラです。内部を透過撮影することで欠陥やボイド検査を可能にします。
紫外域において高い出力を有する安定性に優れた光源です。紫外域において連続スペクトルを有しており、また分析機器用ランプとして要求される長寿命・高安定・高出力を併せ持っています。
高い輝度・色温度で紫外域から赤外域までの連続スペクトルを有する光源です。弊社独自の高性能陰極の採用により、精密測光用ランプとして幅広く使用されています。
瞬間的な高いピーク出力を有するパルス点灯光源です。紫外域から赤外域までの連続スペクトルにより、分析からイメージングまで幅広い用途で使用されています。
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