砥石などを用いて研削することでウェーハ表面を平坦に仕上げる工程です。
高い平坦度に加えて、キズや汚れ・歪みや厚みのバラつきがないことが求められます。
ウェーハ厚を測定してプロセス管理を行います。
薄膜(10 µm)からSiウェーハ(775 µm)まで、幅広い厚み測定を1台で対応します。60 Hzの高速測定の実現により、ウェーハの加工時や回転時などの工程における測定も可能です。
非接触かつリアルタイムで薄膜の膜厚測定が可能です。装置組み込みを容易にするために小型化を実現しています。
レーザ干渉法を採用した非接触で膜厚測定が可能な装置です。厚みのあるガラス等が測定可能です。
ウェーハの不良の原因となる異物や欠陥の検査を行います。
紫外線・赤外線・X線・電子線などの波長域に対応した受発光デバイスにより、非破壊・非接触での微小異物や微細欠陥の検査を可能にします。
X線非破壊検査用の微小焦点X線源です。微小焦点により高幾何学倍率時でもボケの少ない高精細なX線画像の取得を可能にします。
X線非破壊検査用の2次元カメラです。増倍機能を有しており、高速移動する被検査物における高分解能・高コントラストのX線画像の取得を可能にします。
各種欠陥検査やエンドポイントモニタなどに用いられる高感度検出器です。高速蛍光体やシンチレータと組み合わせることにより、フォトダイオードでは検出ができない微弱な電子線も検出可能なため、走査電子顕微鏡(SEM)などにも使用可能です。
X線非破壊検査用のX線1次元カメラです。搬送される被検査物の内部をX線で撮像します。高速撮像が可能で全数検査にも対応します。
ガイガーモードAPDをマルチピクセル化したフォトンカウンティングデバイスです。光半導体素子でありながら、優れた検出能力をもっており、フォトンカウンティングレベルの微弱光の検出が可能です。
逆電圧を印加することにより光電流が増倍される高速・高感度のフォトダイオードです。高いS/Nが得られるため、微弱光検出に適しています。
紫外域・近赤外域において高感度を実現したタイプや、紫外線照射に対して高い耐性をもつタイプなど、波長・使用目的に応じた幅広いラインアップのイメージセンサを取り揃えています。
ウェーハなどの搬送時に発生する帯電を除去します。
Photoionization(光イオン化)を利用することにより、塵や電磁ノイズ・オゾンの発生しないクリーンな除電を実現します。
大気中において高い除電能力を誇る静電気除去装置です。微弱X線を利用することにより、送風不要での0V除電を実現します。また、塵や電磁ノイズの発生がありません。
ウェーハと加工点の位置合わせを行います。
ウェーハとステージの位置がズレることで不良発生やスループット低下に繋がるため、高速かつ高精度なウェーハの位置決めと補正が必要です。
縦長画素 (14 × 200 μm)の受光部を採用した高感度CMOSリニアイメージセンサです。紫外域から近赤外域で高感度を実現しています。
電気エネルギーを光エネルギーに変換する半導体素子です。主に受光素子と組み合わせて使用します。赤色から赤外の波長のさまざまなパッケージのLEDを用意しています。
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