設計したパターンをウェーハに転写するための原版を制作する工程です。
こちらではフォトマスク作成の工程で使用される当社製品をご紹介します。
マスクブランクスやフォトマスク上の異物やパターン不良などの欠陥の検査を行います。
X線源やX線カメラなどにより、非破壊・非接触での微小異物や微細欠陥の検査を可能にします。
X線非破壊検査用の微小焦点X線源です。微小焦点により高幾何学倍率時でもボケの少ない高精細なX線画像の取得を可能にします。
X線非破壊検査用のX線2次元カメラです。増倍機能を有しており、高速移動被写体における高分解能・高コントラストのX線画像の取得を可能にします。
各種欠陥検査/エンドポイントモニターなどに用いられる高感度検出器です。高速蛍光体/シンチレータと組み合わせる事で、PDでは検出が出来ないような微弱な電子線も検出可能になり、走査型顕微鏡(SEM)などにも使用可能です。
CCDの特殊な読み出し方式であるTDI(Time Delay Integration)を採用したカメラです。高速かつ高感度を両立したことにより、搬送される被検査物の移動に合わせて画像を積算して鮮明な撮像を可能にします。
ウェーハなどの搬送時に発生する静電気による帯電を除電します。
帯電対策として弊社には光電離を利用した送風不要なイオナイザがあります。コロナ放電方式とは違い、塵や電磁ノイズ、オゾンの発生しないクリーンな除電を実現しております。
大気中において高い除電能力を誇る静電気除去装置です。微弱X線を利用することにより、送風不要での0V除電を実現します。また、塵や電磁ノイズの発生がありません。
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