エキシマランプ光源はレーザクラスには属しませんが、IEC62471「ランプ及びランプシステムの光生物学的安全性」に属しており、各機種でリスクグループ判定を行っています。
仕様や数量などをもとに検討しますので、お気軽にご相談ください。
接続図に記載されているものが必要となります。
EX-86Uについては、紫外線漏れ対策やオゾン排気のための照射設備が必要です。
照射設備の材質は真空紫外光に対する劣化が少ないSUSもしくはアルミを推奨しています。
オゾン排出用排気ダクトが必要です。
ただし、EX-miniについては冷却機能とオゾン分解機能を有するオプションのオゾン分解ユニット E12685を使用することで排気ダクトが不要となります。
必要な排気レベルは照射設備の体積や気密性によって異なるため、規定していません。お客様の方で照射雰囲気が負圧になるように排気量を調整してください。
照射距離は可能な限り近づけてください。
真空紫外光は大気中での減衰率が高いため、照射距離は1 mm ~ 2 mmを推奨しています。照射距離が離れると、所望の効果が得られるまでの照射時間が長くなります。材料によっては照射時間が数十s以上となる場合もあります。
基本的に窒素パージは不要です。
ただし、照射距離が5 mm以上離れる場合は窒素パージを行うことを推奨しています。
表面改質については、材料に関わらず一定の効果が見込めます。
ドライ洗浄については、有機物は分解・除去できますが、無機物は取り除くことができません。
フッ素樹脂や塩素系樹脂など、ハロゲンを含有する材料に真空紫外光を照射すると、分解生成物によってエキシマランプ光源が悪影響を受ける可能性がありますので、ハロゲンを含有する材料には真空紫外光を照射しないでください。
材料への熱影響はほとんどありません。
ポリエチレン板に照射距離 2 mmで照射した際の表面温度を熱電対で測定したところ、1 minで36 ℃/10 minで58 ℃という結果になりました。
材料によって異なりますが、経過時間とともに処理効果は低下する傾向にあります。
数min程度であればほとんどの場合、処理効果が持続しますので、改質後はすぐに次の工程に移ることを推奨しています。
弊社製紫外線積算光量計での光量管理を推奨しています。
お客様で所有している校正されたUVパワーメータでの光量管理も可能です。
デモ機を用意していますので、お気軽にお問合せください。
目や皮膚に有害な強い紫外線が出ていますので、取り扱いの際には保護具を必ず着用してください。(JIS T 8141参照)
設置の際には紫外線が漏れないような装置設計にしてください。また、照射設備内に発生するオゾンはランプハウスの冷却用排気ダクトでは除去できませんので、別途オゾン排出用排気ダクトを設置してください。
日本産業衛生学会が勧告した基準では、0.1 ppm以下(1日8時間、週5日労働)となっています。
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